SCS EQUIPMENT SCS SPIN COATING SYSTEMS & ACCESSORIES

G3 Spincoat Series

The SCS G3 spincoat series sets new standards in operating precision and programming flexibility, with a high level of rotation accuracy and repeatability, along with precise acceleration and deceleration control.

• Available with eight, twelve and fifteen-inch bowls, in three compact enclosure sizes
• Fast, simple programming by means of microprocessor-based control, using front panel LCD display and keypad
• Close loop servomotor for precise speed regulation
• Programmable and Non-Programmable (eight-inch only)
• Communication port for external control using optional PC interface software for programming, profile storage, PID, diagnostics, vacuum on/off, slow speed centering, and programmable house position.
• Programmable models have the capacity to store and execute up to 30 programs, with up to 20 steps each (unlimited w/ optional software)
• Spin profiles adjustable in 1.0 rpm rotation increments, 0.1 second timing increments, and 1.0 second increments for dwell time, with precise repeatability from cycle to cycle
• Encoder allows vacuum chuck to be stopped at a Home position on programmable models
• Chemically resistant Teflon coated bowl with integral drain
• Hinged, interlocking cover on all models plus safety glass window on programmable models

All three SCS spincoat bowl sizes feature compact housing for convenience when using in fume hoods. Programmable Spincoat models have an optional integrated dispense arm, optional exhaust adapter, and are equipped to control solenoid operation of an optional dispensing unit.

Coating Types:
Photoresists, Polyimides, Metallo-Organics, Dopants and Silica Films

Speed:
0-9,999 RPM, Programmable

Acceleration/Deceleration:
Ramp times from 0.1 to 25.5 seconds, in 0.1 second increments

Power:
115 VAC, 60Hz
or 230 VAC, 50Hz

Spin Coater Chuck Selection

SCS chucks are machined to close tolerances and provide an exceptionally flat, rigid surface for mounting substrates of different sizes, weights, and shapes. Custom chucks are also available.

Proper chuck selection should be based upon substrate size and rigidity. The proper chuck diameter is 1/4 to 1 inch smaller than the substrate diameter. The entire substrate should be supported if it is flexible, fragile, or when it is to be wiped or brushed during cleaning. Vacuum chucks are available in stainless steel, hard anodized aluminum, or DELRIN®. Please specify the material of choice and chuck size when ordering.

		Type CS Chuck Used to hold a thin, planar surfaced substrate such as silicon, glass, or germanium on a spinning shaft for higher or maximum RPMs.
		Type H Chuck Used to hold relatively heavy substrates such as glass, quartz, ceramic, metal, etc.
		Type L Chuck Used to hold heavy, large or unsymmetrical substrates. The guide fingers assist in proper positioning and holding of the substrate.
		Type R Chuck Used to hold square or rectangular substrates. Design achieves a uniform coating across the entire substrate. Custom milled recess holds substrate.

Additional Accessories :
SCS Multi-Dispense System
SCS Hot Plate

For more information on the SCS Multi-Dispense, visit our Technical Library.