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SCS P6708/P6712 Spin Coater
 To download the latest P6708/P6712 Spin Coater brochure click here.
 The
P6708 (8-in. bowl) and P6712 (12-in. bowl) precision coating systems are
capable of executing thirty full-automated, user-determined coating sequences
under the supervision of a programmable logic controller. Each recipe
consists of multiple ramp up, hold, and ramp down steps in the range of
100-8,000 RPM. Acceleration and deceleration rates are computer-calculated
based on the desired profile.
 These
models include a simple keypad for programming and operation, and a user
interface screen for display of process parameters. The unit is capable
of handling a variety of substrate sizes and shapes up to 10 inches in
diameter. Optional spin coater features include multiple coating material
dispensing valves, interchangeable vacuum chucks, and world-wide voltage
values.
Optional Fluid Dispenser. Designed to be full integrated with
our 6700 series. Comes complete with three dispensing needles.
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Coating Types:
Photoresists, Anti-Reflectives, Polyimides, Metallo-Organics, Dopants,
Silica Films, and Most Organic and Aqueous Solutions
Speed:
100-8000 RPM, Programmable
Automatic Timer:
0-999 seconds
Acceleration/Deceleration:
Ramp times from 1.0 to 30 seconds
Power:
115 VAC, 60Hz, 1 amp
or 220 VAC, 50Hz, .5 amp
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P6708 w/ optional
Plexiglass Hood
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Spin Coater Chuck Selection
SCS chucks are machined to close tolerances and provide an exceptionally
flat, rigid surface for mounting substrates of different sizes, weights, and
shapes. Custom chucks are also available.
Proper chuck selection should be based upon substrate size and
rigidity. The proper chuck diameter is 1/4 to 1 inch smaller than the substrate
diameter. The entire substrate should be supported if it is flexible, fragile,
or when it is to be wiped or brushed during cleaning. Vacuum chucks are available
in stainless steel, hard anodized aluminum, or DELRIN®. Please specify the
material of choice and chuck size when ordering.
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Type CS Chuck
Used to hold a thin, planar surfaced substrate such as silicon, glass, or
germanium on a spinning shaft for higher or maximum RPMs. |
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Type H Chuck
Used to hold relatively heavy substrates such as glass, quartz, ceramic,
metal, etc. |
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Type L Chuck
Used to hold heavy, large or unsymmetrical substrates. The guide fingers
assist in proper positioning and holding of the substrate. |
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Type R Chuck
Used to hold square or rectangular substrates. Design achieves a uniform
coating across the entire substrate. Custom milled recess holds substrate. |
Additional Accessories :
SCS Hot Plate
For more information on the SCS Multi-Dispense, visit our Technical Library.
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