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Parylene is applied at room temperature with deposition equipment that controls the coating rate and ultimate thickness. Polymer deposition takes place at the molecular level:
- Raw material Dimer is vaporized under vacuum and heated to a dimeric gas.
- The gas is then pyrolized to cleave the dimer to its monomeric form.
- In the room temperature deposition chamber, the monomer gas deposits as a transparent polymer film.
The required thickness of a coating can vary based on the application, but thickness can range from the hundreds of angstroms to several mils, with the typical coating being in the microns range.
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